JPH0160539U - - Google Patents
Info
- Publication number
- JPH0160539U JPH0160539U JP15579087U JP15579087U JPH0160539U JP H0160539 U JPH0160539 U JP H0160539U JP 15579087 U JP15579087 U JP 15579087U JP 15579087 U JP15579087 U JP 15579087U JP H0160539 U JPH0160539 U JP H0160539U
- Authority
- JP
- Japan
- Prior art keywords
- stage
- semiconductor manufacturing
- fixing
- manufacturing equipment
- processed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000463 material Substances 0.000 claims description 7
- 238000004519 manufacturing process Methods 0.000 claims 4
- 239000004065 semiconductor Substances 0.000 claims 4
- 230000007423 decrease Effects 0.000 claims 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
Landscapes
- Jigs For Machine Tools (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987155790U JPH0648853Y2 (ja) | 1987-10-12 | 1987-10-12 | 半導体製造装置用ステージへの被処理材固定装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987155790U JPH0648853Y2 (ja) | 1987-10-12 | 1987-10-12 | 半導体製造装置用ステージへの被処理材固定装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0160539U true JPH0160539U (en]) | 1989-04-17 |
| JPH0648853Y2 JPH0648853Y2 (ja) | 1994-12-12 |
Family
ID=31433729
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987155790U Expired - Lifetime JPH0648853Y2 (ja) | 1987-10-12 | 1987-10-12 | 半導体製造装置用ステージへの被処理材固定装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0648853Y2 (en]) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60109834U (ja) * | 1983-12-28 | 1985-07-25 | 日立精工株式会社 | プリント基板用穴明機のワ−ククランプ装置 |
| JPS60232840A (ja) * | 1984-05-07 | 1985-11-19 | Hitachi Seiko Ltd | プリント基板クランプ装置 |
-
1987
- 1987-10-12 JP JP1987155790U patent/JPH0648853Y2/ja not_active Expired - Lifetime
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60109834U (ja) * | 1983-12-28 | 1985-07-25 | 日立精工株式会社 | プリント基板用穴明機のワ−ククランプ装置 |
| JPS60232840A (ja) * | 1984-05-07 | 1985-11-19 | Hitachi Seiko Ltd | プリント基板クランプ装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0648853Y2 (ja) | 1994-12-12 |